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个人信息Personal Information
副教授
硕士生导师
教师拼音名称：liuhaijun
入职时间：2016-10-24
所在单位：机械制造工程系
学历：研究生(博士)毕业
性别：男
学位：工学博士学位
在职信息：在职
毕业院校：大连理工大学
学科：机械设计及理论
机械电子工程
机械工程其他专业
机械制造及其自动化
- Liu Haijun，Dong Zhigang,Huang Han,Kang Renke,Zhou Ping，A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique:Measurement Science and Technology,2015
- Liu Haijun,Zhu Xianglong,Kang Renke,Dong Zhigang,Chen Xiuyi，Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers:Precision Engineering,2016,46):339-348.
- Liu Haijun，Han Jiang,Tian Xiaoqing,Dong Fangfang,Chen Shan,Lu Lei，Accurate determination of bifurcation points for ground silicon wafers considering anisotropy using FEM method:Materials Research Express,2019,6(9
- Liu Haijun，Zhou Jing,Tian Xiaoqing,Han Jiang,Chen Shan,Lu Lei，Evaluation of polishing-induced subsurface damage based on residual stress distribution via measured global surface deformation for thinned silicon wafers:Surface Topography: Metrology and Properties,2021,9(3
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