刘海军
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Gender:Male
Education Level:Postgraduate (Doctoral)
Alma Mater:大连理工大学
Scientific Research
Current position:
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Scientific Research
Research Field
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Paper Publications
- Liu Haijun，Dong Zhigang,Huang Han,Kang Renke,Zhou Ping，A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique:Measurement Science and Technology,2015
- Liu Haijun,Zhu Xianglong,Kang Renke,Dong Zhigang,Chen Xiuyi，Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers:Precision Engineering,2016,46):339-348.
- Liu Haijun，Han Jiang,Tian Xiaoqing,Dong Fangfang,Chen Shan,Lu Lei，Accurate determination of bifurcation points for ground silicon wafers considering anisotropy using FEM method:Materials Research Express,2019,6(9
- Liu Haijun，Zhou Jing,Tian Xiaoqing,Han Jiang,Chen Shan,Lu Lei，Evaluation of polishing-induced subsurface damage based on residual stress distribution via measured global surface deformation for thinned silicon wafers:Surface Topography: Metrology and Properties,2021,9(3