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Associate professor

Supervisor of Master's Candidates

Date of Employment:2016-10-24

School/Department:机械工程学院

Education Level:Postgraduate (Doctoral)

Business Address:合肥工业大学屯溪路校区机械楼203

Gender:Male

Degree:Doctoral Degree in Engineering

Status:Employed

Alma Mater:大连理工大学

Discipline:Mechanical Design and Theory
Mechatronic Engineering
Other specialties in Mechanical Engineering
Mechanical Manufacture and Automation

刘海军

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Gender:Male

Education Level:Postgraduate (Doctoral)

Alma Mater:大连理工大学

Paper Publications

Evaluation of polishing-induced subsurface damage based on residual stress distribution via measured global surface deformation for thinned silicon wafers

DOI number:10.1088/2051-672X/ac1047
Journal:Surface Topography: Metrology and Properties
Co-author:Zhou Jing,Tian Xiaoqing,Han Jiang,Chen Shan,Lu Lei
First Author:Liu Haijun
Indexed by:Journal paper
Document Code:035001
Volume:9
Issue:3
Translation or Not:no
Date of Publication:2021-07-07
Included Journals:SCI