合肥工业大学主页平台管理系统 liuhaijun--Home-- A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique

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Associate professor

Supervisor of Master's Candidates

Date of Employment:2016-10-24

School/Department:机械制造工程系

Education Level:Postgraduate (Doctoral)

Business Address:合肥工业大学屯溪路校区机械楼203

Gender:Male

Degree:Doctoral Degree in Engineering

Status:Employed

Alma Mater:大连理工大学

Discipline:Mechanical Design and Theory
Mechatronic Engineering
Other specialties in Mechanical Engineering
Mechanical Manufacture and Automation

Recommended MA Supervisor

Hefei University of Technology

刘海军

Gender:Male

Education Level:Postgraduate (Doctoral)

Alma Mater:大连理工大学

Paper Publications

Current position: Home / Scientific Research / Paper Publications

A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique

Journal:Measurement Science and Technology
Co-author:Dong Zhigang,Huang Han,Kang Renke,Zhou Ping
First Author:Liu Haijun
Indexed by:Journal paper
Translation or Not:no
Date of Publication:2015-10-09
Included Journals:SCI

Next One:Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers

Personal Information

Recommended MA Supervisor

刘海军

Paper Publications