Kunnan Zhou, Longqiang Shan, Yuliang Zhang, De Lu, Yuanming Ma,* Xing Chen, Linbao Luo,* Chunyan Wu.* Fluorine Plasma Treatment for AlGaN/GaN HEMT-based Ultraviolet Photodetector with High Responsivity and High Detectivity. IEEE Electron Dev. Lett. 2023, 44(5): 781-784. May DOI: 10.1109/LED.2023.3262589.
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